Company Filing History:
Years Active: 2011-2018
Title: Byoung-Sup Ahn: Innovator in Semiconductor Technology
Introduction
Byoung-Sup Ahn is a prominent inventor based in Seongnam-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and quality of semiconductor manufacturing processes.
Latest Patents
Ahn's latest patents include an exposure apparatus and a method of manufacturing semiconductor devices. The exposure apparatus features a stage designed to hold a substrate, along with a mark array that includes a first and second mark. These marks are separated by a specific distance, allowing for precise irradiation by two separate beam irradiators. Additionally, a detector is positioned above the mark array to capture reflected beams, while a controller manages the stage's position based on the detector's output.
Another notable patent involves exposure methods utilizing e-beams, aimed at optimizing the total exposure process and improving pattern quality. This method minimizes the time required for mask data preparation and employs an inverse solution concept based on a multi-beam mask writer. The process includes receiving design data, preparing mask data without format conversion, and performing complex corrections to address errors caused by proximity effects and exposure processes.
Career Highlights
Byoung-Sup Ahn is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His work at Samsung has positioned him as a key player in advancing semiconductor manufacturing techniques.
Collaborations
Ahn collaborates with talented coworkers, including Young-Mi Lee and In-Sung Kim, contributing to innovative projects within the semiconductor field.
Conclusion
Byoung-Sup Ahn's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a significant innovator in the industry. His advancements continue to shape the future of semiconductor manufacturing.