Byeung-Wook Choi

Title: The Innovations of Byeung-Wook Choi: Pioneering Advances in Semiconductor Processing

Introduction

Byeung-Wook Choi, based in Suwon-si, Korea, is an accomplished inventor renowned for his contributions to semiconductor processing technology. With a total of two patents to his name, Choi has made significant strides in enhancing the efficiency and effectiveness of plasma etching devices.

Latest Patents

Choi’s latest patents reflect his innovative approach to overcoming challenges in the semiconductor industry. One of his noteworthy inventions is the "Window for Allowing End Point of Etching Process to be Detected and Etching Device Comprising the Same." This end point detection window is designed to prevent process failures in plasma etching devices. The invention features an aluminum or aluminum alloy body with a hole that allows light generated during the etching process to be detected outside the process chamber. A quartz capping section is coupled to the light outlet, ensuring efficient transmission of light.

In addition, Choi holds a patent for a "Focus Ring and Apparatus for Processing a Semiconductor Wafer Comprising the Same." This apparatus enhances the semiconductor wafer processing by utilizing a circular chuck that secures the wafer in a process chamber. The accompanying focus ring plays a pivotal role by directing processing gases or plasma onto the wafer's surface. Its innovative design includes a stepped inner periphery, which includes a collector that traps contaminants created during processing, preventing them from reaching the wafer.

Career Highlights

Choi is currently employed at Samsung Electronics Co., Ltd., where he applies his expertise in semiconductor technologies. His contributions have been instrumental in developing cutting-edge solutions that advance the state of the art in semiconductor manufacturing.

Collaborations

In his professional journey, Choi has collaborated with several talented individuals, including his coworkers Oh-Yeon Han and Guk-Kwang Kim. Their collective efforts have fostered an environment of innovation and have led to significant advancements in the field.

Conclusion

Byeung-Wook Choi’s work exemplifies the spirit of innovation in semiconductor technology. His patents provide valuable contributions that enhance the functionality and reliability of semiconductor processing equipment. As the industry evolves, Choi's inventions will likely continue to play a crucial role in shaping the future of semiconductor manufacturing.