This inventor holds 2 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2012-2013.
Company Filing History:
Years Active: 2012-2013
Title: Byeong-hwan Son: Innovator in Semiconductor Device Patterns
Introduction
Byeong-hwan Son is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in the methods of forming patterns for semiconductor devices. With a total of 2 patents to his name, his work has been instrumental in advancing semiconductor manufacturing processes.
Latest Patents
Byeong-hwan Son's latest patents focus on innovative methods for forming patterns in semiconductor devices. One of his patents describes methods that allow for the simultaneous formation of patterns with various widths. This technique effectively doubles the pattern density through a double patterning process. The process involves creating a dual mask layer on a substrate, followed by a variable mask layer. By utilizing photoresist patterns of differing thicknesses and widths, he enables the formation of intricate mask patterns that enhance the etching process in semiconductor fabrication.
Another patent outlines a method for forming semiconductor device patterns that similarly allows for the simultaneous creation of patterns with varying widths. This method includes the formation of mold mask patterns and the use of spacers to facilitate the etching of lower layers. These advancements contribute to more efficient and precise semiconductor manufacturing.
Career Highlights
Byeong-hwan Son is currently employed at Samsung Electronics Co., Ltd., a leading global technology company. His work at Samsung has positioned him as a key player in the semiconductor industry, where he continues to innovate and develop new technologies.
Collaborations
Throughout his career, Byeong-hwan Son has collaborated with notable colleagues, including Dae-youp Lee and Bong-cheol Kim. These collaborations have further enriched his research and development efforts in semiconductor technology.
Conclusion
Byeong-hwan Son's contributions to semiconductor device patterning represent a significant advancement in the field. His innovative methods and patents are paving the way for more efficient semiconductor manufacturing processes. His work at Samsung Electronics Co., Ltd. continues to influence the industry positively.