Company Filing History:
Years Active: 2003-2007
Title: Innovator Spotlight: Bryan A Helmer - Pioneering Technological Advancements
Introduction:
Bryan A Helmer from Fremont, CA, is a renowned innovator in the technological landscape, known for his groundbreaking inventions that have revolutionized the industry. With a track record of two patents and a commitment to pushing the boundaries of innovation, Helmer stands as a beacon of inspiration for aspiring inventors worldwide.
Latest Patents:
1. Method of Plasma Etching Low-K Dielectric Materials: Helmer's patent introduces a semiconductor manufacturing process that involves plasma etching a low-k dielectric layer with high selectivity to an overlying mask layer. By using specific etchant gases and flow rates, the etch rate of the low-k dielectric layer can significantly exceed that of other mask layers, making it ideal for structures like damascene structures.
2. Profile Control of Oxide Trench Features for Dual Damascene Applications: In this patent, Helmer presents innovative methods for etching trenches into dielectric layers. By carefully controlling the ion-to-neutral flux ratio during etching and modulating physical sputtering, he achieves a flat bottom trench profile without the need for an intermediate etch stop layer. This not only reduces costs and process time but also enhances device performance.
Career Highlights:
Currently working at Lam Research Corporation, a prominent player in the industry, Helmer continues to drive technological advancements forward. Through his expertise and dedication, he has earned a reputation as a key figure in shaping the future of semiconductor manufacturing.
Collaborations:
Helmer's work at Lam Research Corporation has been enriched by collaborations with talented individuals such as Si Yi Li and Helen H Zhu. Together, they have contributed to the development of cutting-edge technologies and solutions that have propelled the company to new heights of success.
Conclusion:
In conclusion, Bryan A Helmer's innovative spirit and commitment to excellence have positioned him as a leader in the field of technological advancements. His patents and contributions reflect a deep understanding of the industry's evolving needs and a relentless drive to push the boundaries of what is possible. As a pioneer in his field, Helmer's work serves as a testament to the power of innovation in shaping a brighter future for us all.