This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2018.
Company Filing History:
Years Active: 2018
Title: Brent Biggs: Innovator in Substrate Processing Technologies
Introduction
Brent Biggs is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate processing, holding a total of 2 patents. His work focuses on advanced apparatus and methods that enhance the efficiency and effectiveness of substrate processing systems.
Latest Patents
Brent's latest patents include innovative technologies such as a substrate processing apparatus and methods. This patent discloses an apparatus for processing substrates, which features a process chamber designed to receive a substrate and includes a plasma forming zone. The system incorporates a substrate support within the chamber, a resonator coil near the plasma zone, and a resonant inductor tuning circuit that adjusts the RF feed point location along the resonator coil. Additionally, he has developed methods for treating nitride films, specifically aimed at reducing oxygen content in oxidized annealed metal nitride films through plasma exposure.
Career Highlights
Brent Biggs is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His role involves the development of cutting-edge technologies that contribute to advancements in substrate processing.
Collaborations
Brent has collaborated with esteemed colleagues such as Takashi Kuratomi and Mark Hyun Lee. Their combined expertise fosters innovation and drives the development of new technologies in their field.
Conclusion
Brent Biggs exemplifies the spirit of innovation in substrate processing technologies. His patents and contributions to Applied Materials, Inc. highlight his commitment to advancing the industry.