The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2018
Filed:
Dec. 16, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Brent Biggs, San Jose, CA (US);
Avgerinos V. Gelatos, Scotts Valley, CA (US);
Takashi Kuratomi, San Jose, CA (US);
Mark H. Lee, Mountain View, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01);
U.S. Cl.
CPC ...
H01L 21/32053 (2013.01);
Abstract
Methods for reducing oxygen content in an oxidized annealed metal nitride film comprising exposing the film to a plasma.