Company Filing History:
Years Active: 2021
Title: Bjoern Liebaug: Innovator in Optical Arrangements for EUV Radiation
Introduction
Bjoern Liebaug is a notable inventor based in Ulm, Germany. He has made significant contributions to the field of optical arrangements, particularly in the context of extreme ultraviolet (EUV) radiation. His innovative work has led to the development of a patented technology that addresses critical challenges in the industry.
Latest Patents
Bjoern Liebaug holds a patent for an "Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma." This patent describes an optical arrangement that includes at least one reflective optical element with a coating that effectively reflects EUV radiation. The design incorporates a shield fitted to the surface region of the reflective optical element, which protects it from the etching effects of surrounding plasma during operation. The distance between the shield and the surface region is optimized to enhance performance and durability.
Career Highlights
Bjoern Liebaug is associated with Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technologies. His work at this esteemed organization has allowed him to push the boundaries of innovation in optical arrangements. With a focus on practical applications, he has contributed to advancements that are crucial for various technological sectors.
Collaborations
Bjoern has collaborated with talented coworkers, including Moritz Becker and Kerstin Hild. Their combined expertise has fostered a creative environment that encourages the development of cutting-edge technologies in optical arrangements.
Conclusion
Bjoern Liebaug's contributions to the field of optical arrangements for EUV radiation exemplify the spirit of innovation. His patented technology not only addresses existing challenges but also paves the way for future advancements in the industry.