Company Filing History:
Years Active: 2005-2006
Title: Innovations of Bing Lu in Semiconductor Technology
Introduction
Bing Lu is a notable inventor based in Gilbert, AZ, who has made significant contributions to the field of semiconductor technology. With a total of 2 patents, his work focuses on advanced methods for fabricating semiconductor devices.
Latest Patents
Bing Lu's latest patents include a "Method for fabricating a mask using a hardmask" and a "Method for making a semiconductor device using the same." The first patent describes a bilayer hardmask used to manufacture a mask that can be implemented to pattern a resist on a semiconductor wafer. This bilayer hardmask consists of two layers: a first hardmask layer, which may be carbon and can be etched selectively to the overlying second hardmask layer and an underlying absorber structure. The second hardmask layer is a transparent layer of SiON, SiN, or SiO. This innovative approach allows for a thinner resist to be used during the mask fabrication process.
The second patent, "Method of fabricating three-dimensional gate structure using oxygen diffusion," provides a method for creating a silicon fin useful in preparing FinFET type semiconductor structures. This method is particularly effective for creating fins with a width and smoothness appropriate for sub-50 nm type gates. The process begins with a silicon fin prepared by lithographic means from an SOI type structure, ensuring that the fin is larger in dimension than desired in the final product. A conformal diffusion layer, such as silicon dioxide, is then deposited onto the fin. The coated fin is heated and exposed to oxygen, allowing the oxygen to diffuse through the diffusion layer and convert a portion of the silicon material to silicon dioxide. This oxidation continues until the remaining silicon has the desired dimensions.
Career Highlights
Bing Lu is currently employed at Freescale Semiconductor, Inc., where he continues to innovate in the semiconductor field. His work has been instrumental in advancing the technology used in modern electronic devices.
Collaborations
Some of his notable coworkers include James R. Wasson and Sang-In Han, who have collaborated with him on various projects within the semiconductor industry.
Conclusion
Bing Lu's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the field. His work continues to influence the development of more efficient and effective semiconductor devices.