Bii-Jung Chang

Title: Innovations by Bii-Jung Chang in Lens Quality Monitoring

Introduction

Bii-Jung Chang is an accomplished inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of optical engineering, particularly in the area of lens quality monitoring. His innovative approach addresses critical challenges in the manufacturing process of color filters.

Latest Patents

Bii-Jung Chang holds a patent for a method to monitor stepper lens quality in the color filter process. This invention is particularly relevant as pigment-based resists tend to emit organic vapors during exposure, leading to contamination of the projection lens surface and other system components. The disclosed method involves a test matrix where exposure time and focal distance are systematically varied. This process allows for the formation of a series of images in the resist, which are then evaluated for quality. A key feature of this invention is the design of test patterns that maximize diffraction during image formation, thereby enhancing sensitivity to changes in lens quality. Several examples of these test patterns are provided in the patent documentation.

Career Highlights

Bii-Jung Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work focuses on improving manufacturing processes and ensuring high-quality outputs in optical systems.

Collaborations

Bii-Jung Chang has collaborated with notable colleagues, including Sheng-Liang Pang and Chih-Kung Chang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Bii-Jung Chang's contributions to lens quality monitoring represent a significant advancement in optical engineering. His innovative methods not only enhance the quality of manufacturing processes but also pave the way for future developments in the field.