Betty Tang

Title: Betty Tang: Innovating Low-k Dielectric Technologies

Introduction

Betty Tang, an accomplished inventor based in San Jose, CA, has made significant contributions to the field of semiconductor manufacturing. With a total of six patents to her name, Tang is particularly recognized for her innovative approaches to dielectric materials and their applications in modern electronics.

Latest Patents

Her latest patent focuses on the development of integrated low-k dielectrics and etch stops. This invention presents a method for depositing and etching dielectric layers that showcase low dielectric constants and etch rates differing by at least 3:1, catering to the formation of horizontal interconnects. The innovative process involves varying the amounts of carbon or hydrogen in the dielectric layer through modifications in deposition conditions. This allows for the creation of low-k dielectric layers that can effectively replace traditional etch stop layers or conventional dielectric layers utilized in damascene applications. The patent also outlines a dual damascene structure featuring two or more dielectric layers with dielectric constants lower than about 4, which can be deposited in a single reactor. This is followed by etching methods that form vertical and horizontal interconnects, utilizing a carbon:oxygen gas mix such as carbon monoxide, while maintaining distinct etch gases for each type of interconnect.

Career Highlights

Betty Tang has dedicated her career to advancing the capabilities of semiconductor devices through innovative materials technology. Working at Applied Materials, Inc., she has been at the forefront of research and development in her field. Her work not only enhances the performance of electronic components but also aligns with the industry's growing demand for more efficient materials.

Collaborations

Throughout her career, Tang has collaborated with esteemed colleagues, including Claes H Bjorkman and Hongquing Shan. These professional partnerships have fostered an environment conducive to innovation, enabling the exploration of new ideas and methods in semiconductor technology.

Conclusion

Betty Tang's contributions to the field of semiconductor manufacturing are noteworthy, particularly her advancements in low-k dielectric technologies. With her cutting-edge patents and collaborations, she continues to play a vital role in the evolution of electronic components, ensuring that innovation remains at the forefront of the industry.