Bernice L Kickel

Title: The Innovative Contributions of Bernice L. Kickel

Introduction

Bernice L. Kickel is a prominent inventor based in Boise, ID (US). She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on improving the quality and reliability of thin oxides used in various electronic applications.

Latest Patents

One of her latest patents is titled "In-situ etch and pre-clean for high quality thin oxides." This invention provides a method for enhancing the quality of thin oxides formed on semiconductor bodies. The etch and pre-clean processes are performed in situ, within a single apparatus. This approach minimizes wafer handling, reduces exposure to clean room air, and decreases time delays between cleaning and oxidation. As a result, it leads to higher yields and greater reliability while also reducing equipment requirements. The etch employs a buffered oxide etchant, resist strip, and pre-clean, all occurring in one apparatus without transfer. This method yields better results than traditional techniques, especially for thin oxides like the tunnel oxides of EEPROMs.

Another notable patent is the "Method of fabricating a high quality thin oxide." This invention outlines a process for forming high-quality thin oxides on semiconductor bodies. It begins with the formation of a sacrificial oxide, which is then etched to remove surface contamination. Following this, an EEPROM oxide is formed, accompanied by an arsenic implant. The thin oxide is preferably grown in a steam ambient and subsequently annealed under nitrous oxide ambient using a combination of in-situ and rapid thermal processing (RTP) annealing.

Career Highlights

Bernice L. Kickel has had a successful career at Zilog, Inc., where she has been able to apply her innovative ideas and technical expertise. Her contributions have significantly advanced the field of semiconductor manufacturing.

Collaborations

Throughout her career, Bernice has collaborated with notable colleagues, including John A. Smythe and John Eugene Berg. These partnerships have fostered an environment of innovation and have led to the development of groundbreaking technologies.

Conclusion

Bernice L. Kickel's work in semiconductor technology exemplifies the impact of innovation on the industry. Her patents reflect her commitment to enhancing the quality and reliability of electronic components. Her contributions continue to influence the field and inspire future advancements.