This inventor holds 3 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 1984-1992.
Location History:
- Unterjettingen, DE (1984)
- Jettingen, DE (1990 - 1992)
Company Filing History:
Years Active: 1984-1992
Title: Innovations of Bernhard Hafner in Photolithography
Introduction
Bernhard Hafner is a notable inventor based in Jettingen, Germany. He has made significant contributions to the field of photolithography, particularly in the development of methods for forming photoresist patterns. With a total of 3 patents to his name, Hafner's work has advanced the capabilities of photolithographic processes.
Latest Patents
Hafner's latest patents focus on a method for forming a photoresist pattern and the corresponding apparatus applicable to this method. This innovative approach allows for the creation of pattern elements with predetermined wall profiles and lateral shapes that differ from those in the irradiation mask used. The method modifies conventional photolithographic processes by shifting the substrate supporting the photoresist layer laterally relative to the mask during exposure. This technique enables the formation of reproducible photoresist patterns that can be flexibly adapted for various applications.
Career Highlights
Bernhard Hafner is associated with International Business Machines Corporation (IBM), where he has been instrumental in advancing photolithographic technologies. His work has not only contributed to the efficiency of manufacturing processes but has also opened new avenues for research and development in the field.
Collaborations
Hafner has collaborated with esteemed colleagues such as Ulrich C Boettiger and Klaus P Thiel. These partnerships have fostered a collaborative environment that enhances innovation and drives the development of new technologies.
Conclusion
Bernhard Hafner's contributions to photolithography through his innovative methods and collaborations have significantly impacted the field. His work continues to inspire advancements in technology and manufacturing processes.