Location History:
- Linas/Montlhery, FR (1993)
- Montlhery, FR (1989 - 1996)
Company Filing History:
Years Active: 1989-1996
Title: Bernard Auda: Innovator in Trench Monitoring Technology
Introduction
Bernard Auda is a notable inventor based in Linas/Montlhery, France. He has made significant contributions to the field of semiconductor manufacturing, particularly in trench monitoring technology. With a total of 3 patents to his name, Auda's work has advanced the precision and efficiency of etching processes in silicon wafers.
Latest Patents
Auda's latest patents include a "Method and apparatus for in-situ and on-line monitoring of trench." This innovative apparatus is designed to monitor the trench formation process in a silicon wafer on a full in-situ and on-line basis. It features two spectrometers that observe the plasma used in the trench etching process at different angles. The spectrometers are tuned to detect specific radiation associated with selected species present in the plasma. The system computes the trench depth and the thickness and rate of deposition of the redeposited SiO₂ layer in real time. The trench formation process is terminated once the computed depth matches a predetermined final depth.
Another significant patent is the "Follow-up system for etch process monitoring." This system utilizes a spectrometer in an interferometric mode for accurate thickness measurement. It aims to produce high-resolution and reproducible patterns in a layer of etchable material formed on a substrate.
Career Highlights
Bernard Auda is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of semiconductor technology. His work has been instrumental in enhancing the capabilities of etching processes, which are critical in the production of microelectronic devices.
Collaborations
Auda collaborates with Roland Chanclou, contributing to advancements in trench monitoring and etching technologies. Their partnership has fostered innovation and improved methodologies in the semiconductor industry.
Conclusion
Bernard Auda's contributions to trench monitoring technology have significantly impacted the semiconductor manufacturing process. His innovative patents and ongoing work at IBM highlight his role as a leading inventor in this field.