The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 1993
Filed:
Jan. 15, 1992
Applicant:
Inventors:
Bernard Auda, Linas/Montlhery, FR;
Roland Chanclou, Perthes en Gatinais, FR;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356381 ; 356316 ; 250372 ;
Abstract
A follow-up system for monitoring the etching process in RIE equipment. A spectrometer is used in an interferometric mode for accurate thickness measuring to produce high-resolution and reproducible patterns in a layer of etchable material formed on a substrate.