Orlando, FL, United States of America

Benu B Patel


Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 9(Granted Patents)


Company Filing History:


Years Active: 2006-2009

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2 patents (USPTO):

Title: The Innovative Journey of Benu B. Patel

Introduction: Benu B. Patel is an accomplished inventor based in Orlando, Florida, who has made significant contributions to the field of materials science and semiconductor technology. With a current tally of two patents, Patel's work primarily focuses on efficient etching processes for titanium-based materials, which are critical in integrated circuit and MEMS structures.

Latest Patents: One of Benu B. Patel's noteworthy patents is a selective isotropic etch for titanium-based materials. This innovative process involves exposing a sacrificial layer of a structure to a plasma derived from nitrogen trifluoride, specifically designed for etching the titanium-nitride and titanium components without affecting the neighboring silicon dioxide or aluminum layers. This selectivity is vital for creating intricate integrated circuit structures as well as micro-electromechanical systems (MEMS).

Career Highlights: Benu B. Patel has established a successful career at Agere Systems Inc., where he has been involved in groundbreaking research and development initiatives. His expertise in semiconductor processing and materials science has positioned him as a key contributor in the industry, driving innovations that enhance technology's capabilities.

Collaborations: Throughout his career, Patel has collaborated with notable coworkers such as Timothy Scott Campbell and Daniel Patrick Chesire. This collaborative approach has allowed for the exchange of ideas and the development of innovative solutions to complex engineering challenges within the tech sector.

Conclusion: Benu B. Patel's contributions to the field of materials science and semiconductor technology demonstrate his substantial expertise and innovative spirit. His patented processes not only advance the manufacturing of integrated circuits and MEMS structures but also underscore the importance of collaboration in fostering innovation within the industry. As he continues to develop new technologies, Patel remains an influential figure in the landscape of modern inventors.

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