Company Filing History:
Years Active: 1991
Title: Innovations by Bala Padmakumar
Introduction
Bala Padmakumar is an accomplished inventor based in Sunnyvale, CA. He has made significant contributions to the field of integrated circuit manufacturing. His innovative approach has led to the development of a unique patent that enhances the manufacturing process of multilayer structures.
Latest Patents
Bala Padmakumar holds a patent for a process that improves the planarization of passivation layers. The patent describes a method of manufacturing an integrated circuit that includes depositing a thin layer of low-temperature oxide (LTO) on top of conductors. This is followed by spinning and curing a thin layer of spin-on-glass to planarize the surface of the device. The structure is then plasma etched to remove the spin-on-glass and a portion of the LTO at approximately the same rate. A mild potassium hydroxide solution is used to completely remove the SOG material, ensuring that the device is free of any organic substances. This process allows for the deposition of a passivation layer that protects the underlying circuitry from ionic contamination, water vapor penetration, and handling.
Career Highlights
Bala Padmakumar is currently employed at Cypress Semiconductor Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the manufacturing processes used in integrated circuits.
Collaborations
Bala has collaborated with notable coworkers, including Alp Malazgirt and Arya Bhattacherjee, who contribute to the innovative environment at Cypress Semiconductor Corporation.
Conclusion
Bala Padmakumar's contributions to the field of integrated circuit manufacturing through his innovative patent demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry positively.