Company Filing History:
Years Active: 2021
Title: Babu Chinnasamy: Innovator in Electronic Device Manufacturing
Introduction
Babu Chinnasamy is a notable inventor based in Bengaluru, India. He has made significant contributions to the field of electronic device manufacturing. His innovative work has led to the development of a unique patent that enhances the efficiency of substrate carrier handling.
Latest Patents
Babu Chinnasamy holds a patent for a "Selectable-rate bottom purge apparatus and methods." This invention pertains to electronic device manufacturing systems that include an equipment front end module (EFEM). The EFEM features a load port assembly designed to receive a substrate carrier, such as a front opening unified pod (FOUP). The load port assembly is equipped with a receiving plate that accommodates the substrate carrier. This receiving plate contains multiple gas nozzles that connect to purge ports at the bottom of the substrate carrier and to a purge apparatus within the load port assembly. The purge apparatus is capable of supplying gas to the substrate carrier at a selectable gas flow rate. Additionally, it can provide gas to different sections of the substrate carrier, each at a selectable gas flow rate. The patent also outlines methods for delivering these selectable gas flow rates for purging a substrate carrier linked to a load port assembly.
Career Highlights
Babu Chinnasamy is currently employed at Applied Materials, Inc., a leading company in the field of semiconductor manufacturing equipment. His work at Applied Materials has allowed him to focus on innovative solutions that improve manufacturing processes. His expertise in electronic device manufacturing has positioned him as a valuable asset to his team.
Collaborations
Babu has collaborated with several talented individuals in his field, including Dean C Hruzek and Paul Benjamin Reuter. These collaborations have fostered an environment of innovation and creativity, leading to advancements in electronic device manufacturing.
Conclusion
Babu Chinnasamy's contributions to electronic device manufacturing through his patent and work at Applied Materials, Inc. highlight his role as an influential inventor. His innovative approaches continue to shape the industry and improve manufacturing processes.