Ayumu Onoyama

Title: Ayumu Onoyama: Innovator in Defect Inspection Technology

Introduction

Ayumu Onoyama is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing through his innovative approaches to defect inspection. With a total of 2 patents, Onoyama's work focuses on enhancing the accuracy and efficiency of defect detection in semiconductor devices.

Latest Patents

Onoyama's latest patents include a defect inspection method and defect inspection equipment. The defect inspection method transforms optical images of a portion that includes a normal conductor pattern with surface roughness, an inspected portion, and a reference portion into images of electric charges. These images are captured as electric signals by an image pick-up device. The method controls the light volume of the optical image to ensure that the pixel signal is saturated or just before saturation. This allows for the detection of defects such as conductor hiatuses, short circuits, and extraneous matter deposition on wafers with high accuracy during the manufacturing processes of semiconductor devices.

The defect detection system is designed to check for any defects in the pattern by comparing it with a reference pattern. It employs edge detection means to identify the pattern edge by scanning the substrate with laser beams and detecting the reflected light. The system corrects any misalignment of less than one pixel between the pattern to be checked and the reference pattern, thereby preventing false defect occurrences.

Career Highlights

Ayumu Onoyama is currently employed at Mitsubishi Electric Corporation, where he continues to develop innovative solutions in the semiconductor industry. His work has been instrumental in advancing defect detection technologies, which are crucial for maintaining the quality and reliability of semiconductor devices.

Collaborations

Onoyama collaborates with notable colleagues, including Koichi Sakurai and Tatsuya Fujii. Their combined expertise contributes to the ongoing development of cutting-edge technologies in the field.

Conclusion

Ayumu Onoyama's contributions to defect inspection technology have significantly impacted the semiconductor manufacturing industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.