Company Filing History:
15 out of 90,594 
1 out of 1 
1 out of 3 Years Active: 1993-2003
Title: Innovator Atsushi Yamagami: A Pioneer in Plasma Processing Technologies
Introduction
Atsushi Yamagami, located in Kawasaki, Japan, is a distinguished inventor recognized for his groundbreaking contributions to the field of plasma processing technologies. With 16 patents to his name, Yamagami has made significant advancements in the methods and apparatus used in the industry, particularly focusing on improving the efficiency and effectiveness of substrate processing.
Latest Patents
One of Yamagami's most recent inventions is a plasma processing apparatus. This innovative system features a substrate holder positioned within a reaction vessel designed to operate under reduced pressure. A process gas is introduced into the vessel, and a cathode electrode transmits high-frequency wave power through a matching circuit. A unique aspect of this apparatus is that part of the reaction vessel is made from a dielectric material, allowing the cathode electrode to be located outside the vessel. This design enhances the uniformity of plasma distribution, facilitating uniform plasma processing of substrates. The applicable plasma processes include chemical vapor deposition (CVD), sputtering, etching, and ashing.
Another significant patent from Yamagami focuses on a plasma CVD apparatus and the associated processing methods, which further illustrate his innovative approach to plasma technology.
Career Highlights
Throughout his career, Atsushi Yamagami has had substantial experience working for prominent companies. He has been associated with Canon and Applied Materials Japan Inc., where he honed his skills in plasma processing technologies. His expertise has allowed him to develop cutting-edge solutions that address the challenges faced in substrate processing.
Collaborations
Yamagami has worked alongside notable professionals in his field, including colleagues Satoshi Takaki and Nobuyuki Okamura. These collaborations have fostered an environment of innovation, leading to several advancements in plasma processing techniques.
Conclusion
Atsushi Yamagami continues to be a driving force in the realm of plasma processing technologies. With 16 patents, his contributions significantly impact the industry, highlighting his role as an innovative inventor. His latest developments reflect his dedication to improving substrate processing methods and illustrate the ingenuity that defines his career.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.