Location History:
- Kanagawa, JP (1999)
- Kawasaki, JP (1996 - 2011)
- Kokubunji, JP (2014)
Company Filing History:
Years Active: 1996-2014
Title: Atsuo Fushida: Innovator in Semiconductor Technology
Introduction
Atsuo Fushida is a prominent inventor based in Kawasaki, Japan, known for his significant contributions to semiconductor technology. With a total of 7 patents to his name, Fushida has made remarkable advancements in methods related to semiconductor device manufacturing.
Latest Patents
Fushida's latest patents include a method of manufacturing semiconductor devices that involves mounting a substrate on an electrostatic chuck within a chamber. This method ensures that the substrate is retained in an atmosphere with a lower temperature before being fixed onto the chuck by applying a voltage. The electrostatic chuck is then heated to a higher temperature after the substrate is mounted, followed by processing the substrate. Another notable patent is a defect source analysis method and apparatus that enhances the accuracy of defect source analysis (DSA) for semiconductor devices. This method utilizes data from defect inspection processes to evaluate fabrication steps effectively, allowing for targeted actions to address any issues.
Career Highlights
Throughout his career, Fushida has worked with notable companies such as Fujitsu Corporation and Fujitsu Semiconductor Limited. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Fushida has collaborated with several professionals in the field, including Hiromi Hayashi and Tatsuya Yamazaki. These collaborations have likely enriched his work and led to further advancements in semiconductor manufacturing techniques.
Conclusion
Atsuo Fushida's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a key figure in the industry. His work continues to influence the development of efficient semiconductor manufacturing processes.