Location History:
- Newark, CA (US) (1988)
- Fremont, CA (US) (1991)
Company Filing History:
Years Active: 1988-1991
Title: Arya Bhattacherjee: Innovator in Semiconductor Manufacturing
Introduction
Arya Bhattacherjee is a notable inventor based in Fremont, CA (US). She has made significant contributions to the field of semiconductor manufacturing, holding 2 patents that showcase her innovative approach to integrated circuit design.
Latest Patents
Her latest patents include a process for improved planarization of the passivation layers and a rapid thermal nitridized oxide locos process. The first patent details a method of manufacturing an integrated circuit with a multilayer structure. This method involves depositing a thin layer of low-temperature oxide (LTO) on conductors, followed by spinning and curing a thin layer of spin-on-glass to planarize the device's surface. The structure is then plasma etched to remove the spin-on-glass and a portion of the LTO, ensuring the device is free of organic substances. The second patent focuses on minimizing bird's beak in local oxidation of silicon, which is crucial for high-density semiconductor devices. This process utilizes rapid thermal nitridization to achieve consistent results with minimal thermal cycling.
Career Highlights
Arya currently works at Cypress Semiconductor Corporation, where she applies her expertise in semiconductor technology. Her innovative methods have contributed to advancements in the manufacturing processes of integrated circuits.
Collaborations
She collaborates with talented coworkers, including Alp Malazgirt and Bala Padmakumar, who share her commitment to innovation in the semiconductor industry.
Conclusion
Arya Bhattacherjee's contributions to semiconductor manufacturing through her patents and collaborative efforts highlight her role as a key innovator in the field. Her work continues to influence the development of advanced technologies in integrated circuits.