Arunkumar Tatti

Title: Arunkumar Tatti: Innovator in Electrostatic Chuck Technology

Introduction

Arunkumar Tatti is a notable inventor based in Haveri, India. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and functionality of electrostatic chucks used in various applications.

Latest Patents

One of his latest patents is for a cathode assembly designed for the integration of embedded electrostatic chucks (ESC). This invention includes an apparatus featuring an electrostatic chuck that consists of an electrically conductive first body and a ceramic insert with an embedded electrode. The design also incorporates a facility plate that is coupled to the ESC, which includes a second body with a hole for a DC input connector and an RF feed line. This innovative design ensures that the pin of the DC input connector is electrically isolated from the RF feed line.

Another significant patent by Tatti involves methods and apparatus for mask patterning debris removal. This method utilizes laser patterning techniques to effectively remove mask trench debris, allowing for the formation of etch singulation trenches. The process includes forming a mask layer on a wafer, using a laser to create a pattern, and employing gas nozzles to direct pressurized gas for debris evacuation. This innovative approach enhances the efficiency of the etching process.

Career Highlights

Arunkumar Tatti is currently employed at Applied Materials, Inc., where he continues to develop cutting-edge technologies in the semiconductor industry. His work has been instrumental in advancing the capabilities of electrostatic chucks, which are critical components in various manufacturing processes.

Collaborations

Throughout his career, Tatti has collaborated with talented professionals, including Eng Sheng Peh and Karthik Balakrishnan. These collaborations have contributed to the successful development of his innovative technologies.

Conclusion

Arunkumar Tatti is a distinguished inventor whose work in electrostatic chuck technology has led to significant advancements in the field. His patents reflect a commitment to innovation and efficiency, making him a valuable contributor to the industry.