Arthur W Zafiropoulo

Title: Arthur W Zafiropoulo: Innovator in Integrated Processing Systems

Introduction

Arthur W Zafiropoulo is a notable inventor based in Manchester, MA (US). He has made significant contributions to the field of integrated processing systems, holding a total of 12 patents. His work primarily focuses on advancements in wafer processing technology.

Latest Patents

Among his latest patents is an innovative integrated processing system that features multiple reactors connected to a central chamber. This system includes a wafer queuing station and several plasma reactors that are strategically positioned along the peripheral walls of a central vacuum chamber. The design incorporates vacuum valves that effectively separate the central chamber from both the queuing station and the plasma reactors. Additionally, a wafer transfer arm capable of R-&THgr; motion allows for the efficient transfer of wafers between the queuing station and any of the plasma reactors, facilitating both single-step and multi-step processes.

Career Highlights

Throughout his career, Zafiropoulo has worked with prominent companies such as General Signal Corporation and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in the development of advanced processing systems.

Collaborations

Zafiropoulo has collaborated with notable professionals in his field, including Joseph A Maher and E John Vowles. These collaborations have further enriched his work and innovations.

Conclusion

Arthur W Zafiropoulo stands out as a significant figure in the realm of integrated processing systems. His innovative patents and career achievements reflect his dedication to advancing technology in wafer processing.