This inventor holds 1 USPTO granted patent. Top assignee: Chartered Semiconductor Manufacturing Ltd (Corporation). Active years: 2001.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001
Title: Arthur Khoon Siah Aug: Innovator in Semiconductor Technology
Introduction
Arthur Khoon Siah Aug is a notable inventor based in Singapore, recognized for his contributions to semiconductor technology. He has developed innovative methods that enhance the performance and reliability of semiconductor devices. His work is particularly significant in the field of dielectric materials used in metal interconnects.
Latest Patents
Arthur Khoon Siah Aug holds a patent for the "IMD scheme by post-plasma treatment of FSG and TEOS oxide capping layer." This invention outlines a method of forming a metal interconnect within a fluorinated silica glass dielectric layer while preventing outgassing from the FSG dielectric layer. The process involves several steps, including the treatment of a FSG dielectric layer with nitrogen gas/plasma to create a fluorine-depleted capping layer, followed by the formation of a TEOS oxide layer. This innovative approach ensures the integrity of the semiconductor structure by minimizing outgassing, which can adversely affect device performance.
Career Highlights
Arthur Khoon Siah Aug is currently employed at Chartered Semiconductor Manufacturing Ltd, where he applies his expertise in semiconductor fabrication. His work has significantly contributed to advancements in the manufacturing processes of semiconductor devices. He is known for his meticulous approach to problem-solving and his ability to innovate within the constraints of existing technologies.
Collaborations
Arthur has collaborated with esteemed colleagues such as Qiong Li and Feng Chen. Their combined efforts have led to significant advancements in semiconductor technology, showcasing the importance of teamwork in driving innovation.
Conclusion
Arthur Khoon Siah Aug is a prominent figure in the semiconductor industry, with a focus on improving the reliability of metal interconnects through innovative methods. His contributions continue to influence the field, making him a valuable asset to the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile