Company Filing History:
Years Active: 1999-2002
Title: Arthur Hamer: Innovator in Semiconductor Processing Technology
Introduction
Arthur Hamer is a notable inventor based in Sun Lakes, AZ (US), recognized for his contributions to semiconductor processing technology. With a total of five patents to his name, Hamer has made significant advancements in the field, particularly in the areas of polishing, cleaning, rinsing, and drying semiconductor wafers.
Latest Patents
Hamer's latest patents include a mapping system for semiconductor wafer cassettes and a combined CMP and wafer cleaning apparatus. The mapping system is an integral machine designed for the efficient processing of semiconductor wafers. It features a load/unload station with multiple platforms for receiving cassettes of wafers. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. The transfer apparatus, equipped with wafer carrier elements, moves the wafers to a polishing table for polishing and returns them to the index table for further processing. A flipper then moves the polished wafers to a cleaning station, which includes scrub stations, a rinsing station, and a spin dryer station, all connected by a system of water tracks. The wet end-effector of the robot transfers rinsed wafers to the spin dryer station, while the dry end-effector moves the dried wafers back to their original cassettes.
Career Highlights
Arthur Hamer is currently employed at Speedfam-IPEC Corporation, where he continues to innovate in the semiconductor industry. His work has been instrumental in developing technologies that enhance the efficiency and effectiveness of wafer processing.
Collaborations
Hamer collaborates with talented coworkers, including Jose R Gonzalez-Martin and Chris E Karlsrud, who contribute to the innovative environment at Speedfam-IPEC Corporation.
Conclusion
Arthur Hamer's contributions to semiconductor processing technology through his patents and work at Speedfam-IPEC Corporation highlight his role as a key innovator in the field. His advancements continue to shape the future of semiconductor manufacturing.