Company Filing History:
Years Active: 2016
Title: Arne Schob: Innovator in Microlithography
Introduction
Arne Schob is a notable inventor based in Jena, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative patent. His work is instrumental in advancing technologies used in projection exposure apparatuses.
Latest Patents
Arne Schob holds a patent for a "Projection objective of a microlithographic projection exposure apparatus." This invention features a wavefront correction device that includes a refractive optical element with two opposite optical surfaces. The design allows projection light to pass through while ensuring optimal performance. The patent also describes a system that directs heating light to specific portions of the optical element, creating a refractive index distribution that corrects wavefront errors.
Career Highlights
Arne Schob is associated with Carl Zeiss SMT GmbH, a leading company in optical systems and technologies. His work at this esteemed organization has allowed him to collaborate with other talented professionals in the field.
Collaborations
Some of his notable coworkers include Johannes Zellner and Boris Bittner. Their collective expertise contributes to the innovative environment at Carl Zeiss SMT GmbH.
Conclusion
Arne Schob's contributions to microlithography through his patent and work at Carl Zeiss SMT GmbH highlight his role as a key innovator in the field. His advancements continue to influence the development of projection exposure technologies.