Company Filing History:
Years Active: 1998
Title: The Innovations of Arnaud Grevoz
Introduction
Arnaud Grevoz, based in Créteil, France, is an inventive mind whose work is pivotal in the field of spectroscopic measurement techniques. With a focus on improving the accuracy and efficiency of measurement methods, Grevoz has made significant contributions to the innovation landscape, particularly for periodic structures in nanotechnology.
Latest Patents
Grevoz holds a patent for a groundbreaking method titled "Measurement and control of linewidths in periodic structures using a non-destructive method of spectroscopic ellipsometry." This innovative technique is uniquely designed to measure the width of features in periodic structures, specifically those below one micron, without causing damage to the samples. The method allows for comparisons between known reference structures and sample structures, facilitating real-time control over the fabrication processes within plasma etching reactors. By monitoring peaks in DELTA and PSI functions relative to wavelength and adjusting etching conditions accordingly, his approach surpasses traditional methods like scanning electron microscopy, which are destructive, and also improves upon scatterometry techniques that require complex detector arrangements.
Career Highlights
Throughout his career at Lucent Technologies Inc., Grevoz has been at the forefront of technological advancements in measurement systems. His innovative spirit and dedication to research have enabled him to pioneer techniques that significantly enhance precision in semiconductor manufacturing and other related fields.
Collaborations
Working alongside talented colleagues such as Nadine Blayo and Tseng-Chung Lee has allowed Grevoz to strengthen his research initiatives. Their combined expertise fosters a collaborative environment that prioritizes innovation and technical advancement.
Conclusion
Arnaud Grevoz exemplifies the essence of innovation with his forward-thinking approach to measurement techniques in nanotechnology. His contributions not only emphasize the importance of non-destructive testing methods but also pave the way for more precise manufacturing processes in various technological applications.
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