Company Filing History:
1 out of 80 
1 out of 832,843 Years Active: 2015-2021
Title: The Innovative Contributions of Anthony Barker
Introduction
Anthony Barker is a notable inventor based in Cardiff, GB. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of plasma etching processes.
Latest Patents
One of Anthony Barker's latest patents is a clamp assembly designed for clamping an outer peripheral portion of a substrate to a support in a plasma processing chamber. This innovative clamp assembly allows for the application of RF bias power to the support during the plasma processing of the substrate. The assembly consists of an outer clamp member and an inner clamp member, with the inner member defining an aperture that exposes the substrate to the plasma processing. The design ensures that the inner portion of the outer clamp member is spaced apart from the inner clamp member, optimizing the clamping process.
Another significant patent by Barker is a method of plasma etching a silicon carbide workpiece. This method involves forming a mask on the surface of the workpiece and performing an initial plasma etch using a specific set of process conditions. The plasma is generated using an etchant gas mixture that includes oxygen and at least one fluorine-rich gas, maintaining a volume ratio of less than 50%. Following this, a bulk plasma etch process is conducted using a different set of process conditions, showcasing Barker's innovative approach to plasma etching.
Career Highlights
Throughout his career, Anthony Barker has worked with various companies, including SPTS Technologies Limited. His experience in the industry has allowed him to develop and refine his inventions, contributing to advancements in plasma processing technology.
Collaborations
Anthony has collaborated with notable professionals in his field, including Huma Ashraf and Brian Kiernan. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Anthony Barker's contributions to plasma processing technology through his patents and collaborations highlight his innovative spirit and dedication to advancing the field. His work continues to influence the industry and inspire future innovations.