Ansgar Holle

Title: Ansgar Holle: Innovator in Microlithographic Technology

Introduction

Ansgar Holle is a notable inventor based in Heidenheim, Germany. He has made significant contributions to the field of microlithography, particularly in the design of projection exposure apparatuses. His innovative work has led to the development of a unique assembly that enhances the functionality of optical elements.

Latest Patents

Ansgar Holle holds 1 patent for his invention titled "Assembly in a microlithographic projection exposure apparatus." This patent describes an assembly that includes an optical element and at least one weight compensating device. The device features a magnetic circuit that generates a magnetic field, which produces a force to partially compensate for the weight acting on the optical element. Additionally, the apparatus incorporates a coil arrangement with multiple coils that can be energized with electrical current to generate a compensating force. This force helps to counteract parasitic forces exerted by the magnetic circuit during the movement of the optical element.

Career Highlights

Ansgar Holle is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technologies. His work at this esteemed organization has allowed him to collaborate with other talented professionals in the industry.

Collaborations

Some of Ansgar's coworkers include Jasper Wesselingh and Michael Erath. Their collective expertise contributes to the innovative environment at Carl Zeiss SMT GmbH.

Conclusion

Ansgar Holle's contributions to microlithographic technology exemplify the importance of innovation in advancing optical systems. His patent reflects a significant step forward in enhancing the functionality of projection exposure apparatuses.