Company Filing History:
Years Active: 2005
Title: The Innovative Contributions of Anna M Phillips
Introduction
Anna M Phillips is a prominent inventor based in Manchaca, TX (US). She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on improving the efficiency and effectiveness of semiconductor devices.
Latest Patents
Anna's latest patents include a semiconductor device and a method for forming a semiconductor device using post gate stack planarization. This innovation addresses the challenges associated with very uniform depths of via holes to the source/drains of a transistor. By polishing a dielectric over the gate stack to a polish stop, she ensures that the top surface is coplanar with the polish stop layer, resulting in a uniform height across the wafer. This uniformity allows for a minimized photoresist thickness, which is crucial for maintaining a pattern for etching.
Another notable patent involves the formation of inverted isolation trenches with convex sidewalls. This method begins with the creation of composite isolation posts on a substrate through deposition, lithography, and etching. The posts consist of a silicon dioxide bottom layer and an overlying silicon nitride etch-stop layer. An insulating material is then deposited, and isolation structures are established by etching to form convex sidewall spacers. This innovative approach enhances the performance of semiconductor devices.
Career Highlights
Anna M Phillips is currently employed at Freescale Semiconductor, Inc., where she continues to push the boundaries of semiconductor technology. Her work has been instrumental in developing advanced methods that improve device performance and reliability.
Collaborations
Throughout her career, Anna has collaborated with notable colleagues, including Nigel Graeme Cave and Terry Grant Sparks. These partnerships have fostered an environment of innovation and creativity, leading to groundbreaking advancements in the semiconductor field.
Conclusion
Anna M Phillips is a trailblazer in semiconductor technology, with a focus on enhancing device performance through innovative methods. Her contributions have made a lasting impact on the industry, and her patents reflect her commitment to advancing technology.