This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Asml Netherlands B.v.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Anirudh Anand: Inventor in Optical Temperature Measurement
Introduction
Anirudh Anand is an inventor based in Eindhoven, the Netherlands. His patent work addresses temperature measurement in optical systems, including equipment used in lithography.
Latest Patents
Anand is associated with 1 patent, titled “Temperature Measurement of Optical Elements in an Optical Apparatus.” The invention describes an optical apparatus with a reflective optical element and at least one sensor configured to detect radiation corresponding to the temperature of a portion of the element’s backside surface. It also describes a method for controlling the temperature of an optical element’s reflective surface in a lithographic apparatus.
Career Highlights
Anand works at ASML Netherlands B.V., a company active in lithography systems. His disclosed invention focuses on sensing and controlling optical-element temperatures, which are relevant to the operation of lithographic equipment.
Collaborations
Anand’s listed coworkers include Joost André Klugkist and Koen Martin Willem Jan Bos.
Conclusion
Anirudh Anand’s patent contribution concerns temperature sensing and control for reflective optical elements in lithographic apparatus, reflecting his work in an advanced technology setting at ASML Netherlands B.V.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile