Anil Kumar Tummanapelli

Title: **The Innovative Mind of Anil Kumar Tummanapelli**

Introduction

Anil Kumar Tummanapelli, based in Telangana, India, is an accomplished inventor with a strong focus on advancing material deposition technologies. His innovative work has led to significant contributions in the field of silicon nitride film deposition, a key element in various semiconductor applications.

Latest Patents

Anil holds a notable patent for "Chalcogen precursors for deposition of silicon nitride." This patent outlines methods for depositing silicon nitride (SiN) films on substrates using chalcogen silane precursors. The innovative processes described involve exposing the substrate to the chalcogen silane and a reactant to effectively deposit the SiN film, with options for sequential or simultaneous exposures. Notably, these chalcogen silanes can be substantially free of halogens, and the chalcogens can include sulfur (S), selenium (Se), and tellurium (Te).

Career Highlights

Anil Kumar Tummanapelli works at Applied Materials, Inc., a leading company in the field of materials engineering. His role involves extensive research and practical application of advanced materials, pushing the boundaries of what is possible in semiconductor manufacturing and related technologies.

Collaborations

Anil collaborates with skilled professionals in his field, including coworkers Chandan Kr Barik and Michael G Haverty. This collaborative environment fosters innovation and allows for the exchange of ideas, crucial for developing cutting-edge technologies and enhancing the impact of their research.

Conclusion

Anil Kumar Tummanapelli exemplifies the spirit of invention and innovation with his patent contributions and role at Applied Materials, Inc. His work on chalcogen silane precursors and silicon nitride films is instrumental in the advancement of semiconductor technologies, showcasing the important role inventors play in driving progress in the industry.