Company Filing History:
Years Active: 2014
Title: **Andrew Yao: Innovator in Silicon Processing Technology**
Introduction
Andrew Yao is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor manufacturing through his innovative approaches to silicon processing. With his expertise, he has developed methods that enhance the efficiency and effectiveness of silicon protection during critical manufacturing stages.
Latest Patents
Andrew Yao holds a patent for an "Enhanced passivation process to protect silicon prior to high dose implant strip." This patent addresses the need for improved methods and apparatus for stripping photoresist and removing ion implant-related residues from a workpiece surface. His invention consists of exposing the workpiece to a passivation plasma, allowing it to cool for a designated time, and subsequently exposing it to an oxygen-based or hydrogen-based plasma. This process effectively reduces silicon loss while minimizing or eliminating residue and maintaining an acceptable strip rate. The methods provided are particularly useful after high-dose ion implantation processes.
Career Highlights
Throughout his career, Andrew Yao has been associated with Novellus Systems Incorporated, a company known for its innovative solutions in semiconductor manufacturing. His role at Novellus has allowed him to push the boundaries of technology and develop patent solutions that address the industry's challenges.
Collaborations
Andrew has worked alongside his skilled colleagues David Wingto Cheung and Haoquan Fang. Their collaboration has contributed to advancing technologies that improve the performance and reliability of semiconductor devices.
Conclusion
Andrew Yao's work exemplifies the impact of innovation in the semiconductor industry. His patent on enhanced passivation processes not only demonstrates his technical prowess but also contributes to improving manufacturing efficiency. His ongoing work at Novellus Systems Incorporated continues to influence the field, and his collaborations with talented professionals only strengthen the advancements in this vital sector.