Company Filing History:
Years Active: 1986-1995
Title: The Innovative Contributions of Andrew P. Lane
Introduction
Andrew P. Lane is a notable inventor based in Westminster, Texas. He has made significant contributions to the field of semiconductor technology, holding three patents to his name. His work primarily focuses on methods that enhance the efficiency and effectiveness of wafer processing.
Latest Patents
One of Andrew's latest patents is a method for minimizing particle generation on a wafer surface during high-temperature processes. In this innovative approach, a wafer is supported with its polished face down in a recess formed in a second wafer, which serves as a support. The two wafers are placed in a steam atmosphere at 900 degrees Celsius and a pressure of 500 psi, resulting in the formation of an oxide on the polished face of the wafer. Another significant patent involves the deposition of silicon-containing films using organosilicon compounds. In a low-pressure reactor, the addition of nitrogen trifluoride to a gaseous organosilicon compound, such as tetraethoxysilane or tetramethylcyclotetroxysilane, leads to enhanced silicon dioxide deposition rates. This process is capable of filling features with aspect ratios up to at least 1.0 and may exhibit low mobile ion concentrations.
Career Highlights
Andrew P. Lane is currently employed at Texas Instruments Corporation, where he continues to innovate in the semiconductor industry. His work has contributed to advancements in wafer processing techniques, which are crucial for the production of high-quality semiconductor devices.
Collaborations
Throughout his career, Andrew has collaborated with notable colleagues, including Douglas A. Webb and Gene R. Frederick. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in the field.
Conclusion
Andrew P. Lane's contributions to semiconductor technology through his patents and work at Texas Instruments Corporation highlight his role as a significant inventor in the industry. His innovative methods continue to influence the efficiency of wafer processing, showcasing the importance of his work in advancing technology.