Company Filing History:
Years Active: 1987-2002
Title: The Innovative Contributions of Andrew L Nordquist
Introduction
Andrew L Nordquist is a notable inventor based in Mountain View, CA (US). He has made significant contributions to the field of plasma technology, holding a total of 5 patents. His work focuses on improving the uniformity and efficiency of plasma processes, which are critical in various manufacturing applications.
Latest Patents
One of his latest patents is titled "Apparatus and method for controlling plasma uniformity across a substrate." This invention involves a magnetron source that comprises a hollow cathode with a non-planar target. By utilizing a magnet positioned between the cathode and a substrate, Nordquist's method allows for the control of plasma to achieve high ionization levels, good step coverage, and excellent process uniformity. Additionally, he has developed a patent for a "Physical vapor deposition reactor including magnet to control flow of ions." This novel hollow cathode magnetron source also employs a magnet to enhance plasma control, further improving step coverage uniformity by managing the magnetic fields and the flow of ions and electrons near the substrate.
Career Highlights
Throughout his career, Andrew L Nordquist has worked with prominent companies such as Novellus Systems Incorporated and Varian Associates, Inc. His experience in these organizations has allowed him to refine his expertise in plasma technology and contribute to advancements in the field.
Collaborations
Nordquist has collaborated with talented individuals, including Kwok Fai Lai and Kaihan Abidi Ashtiani. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Andrew L Nordquist's contributions to plasma technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.