This inventor holds 1 USPTO granted patent. Top assignee: Intel Corporation. Active years: 2007.
Company Filing History:
Years Active: 2007
Title: Andrea C Oehler: Innovator in Chemical Mechanical Polishing
Introduction
Andrea C Oehler is a prominent inventor based in Beaverton, OR (US). She has made significant contributions to the field of semiconductor manufacturing through her innovative work. With a focus on enhancing the efficiency and effectiveness of chemical mechanical polishing (CMP), Oehler's inventions have the potential to impact various industries.
Latest Patents
Oehler holds a patent for "Pre-coated particles for chemical mechanical polishing." This invention relates to the manufacture and use of novel pre-coated abrasive particles and particle slurries for CMP of semiconductor wafers, thin films, inter-layer dielectric, metals, and other components during integrated circuit, flat panel display, or MEMS manufacturing. The polishing slurry abrasive particles can be pre-coated with additives, such as inhibitors and/or surfactants, during the manufacture of the abrasive particles or slurry. This innovative approach allows for a more stable, selectable, and predictable ratio of abrasive particles pre-coated with a specific amount and type of additives.
Career Highlights
Andrea C Oehler is associated with Intel Corporation, where she continues to advance her research and development efforts. Her work at Intel has positioned her as a key player in the semiconductor industry, contributing to the ongoing evolution of manufacturing processes.
Collaborations
Oehler has collaborated with notable colleagues, including Reza M Golzarian and Mansour Moinpour. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Andrea C Oehler's contributions to the field of chemical mechanical polishing exemplify her dedication to innovation in semiconductor manufacturing. Her patent and work at Intel Corporation highlight her role as a leading inventor in this critical area of technology.
