This inventor holds 1 USPTO granted patent and 1 EPO patent. Top assignee: Kla Tencor Corporation. Active years: 2019.
Company Filing History:
Years Active: 2019
Title: Amrish Kelkar: Innovator in Semiconductor Inspection Technologies
Introduction
Amrish Kelkar is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor inspection technologies. His innovative work has led to the development of methods that enhance the accuracy and efficiency of semiconductor sample inspections.
Latest Patents
Amrish Kelkar holds a patent titled "Methods and apparatus for polarizing reticle inspection." This patent discloses methods and apparatus for measuring and controlling polarization for the inspection of semiconductor samples. The method includes several steps: setting up an inspection system in a specific mode of operation, incrementing a first waveplate through multiple rotations while keeping a second waveplate static, measuring intensity signals from non-patterned areas of the sample for each rotation, and generating a model of polarization and waveplate parameters to simulate the measured intensity signals. This innovative approach allows for precise determination of polarization and waveplate parameters based on the model.
Career Highlights
Amrish Kelkar is currently employed at Kla Tencor Corporation, where he continues to advance semiconductor inspection technologies. His work at the company has positioned him as a key player in the development of innovative solutions for the semiconductor industry.
Collaborations
Throughout his career, Amrish has collaborated with talented individuals such as Haifeng Huang and Rui-Fang Shi. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Amrish Kelkar's contributions to semiconductor inspection technologies through his innovative patent demonstrate his expertise and commitment to advancing the field. His work continues to impact the industry positively.