Ameeta Madhava

Title: Ameeta Madhava: Innovator in Semiconductor Processing Technologies

Introduction

Ameeta Madhava is a prominent inventor based in San Francisco, CA. She has made significant contributions to the field of semiconductor processing, holding 2 patents that focus on improving the efficiency and effectiveness of cleaning processes in substrate processing chambers.

Latest Patents

Her latest patents include innovative technologies aimed at enhancing the cleaning of substrate processing chambers. The first patent, titled "Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber," describes a substrate processing apparatus equipped with a substrate support and a gas delivery system. This system provides an energized cleaning gas to the chamber, effectively cleaning process residues. A detector monitors the chemiluminescent radiation emitted during the cleaning process, generating a signal that helps determine the endpoint of the cleaning process.

The second patent, "Method and apparatus for reducing particle contamination on wafer backside during CVD process," addresses the issue of backside particle contamination in semiconductor wafers during chemical vapor deposition. This patent outlines several optimizations, including the deposition of a high-quality oxide seasoning layer and redesigning the wafer heater to minimize physical contact with the wafer backside. These innovations significantly reduce contamination and improve the overall quality of the semiconductor wafers.

Career Highlights

Ameeta Madhava is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her work focuses on developing advanced technologies that enhance the performance and reliability of semiconductor manufacturing processes.

Collaborations

Throughout her career, Ameeta has collaborated with notable colleagues, including Bok Hoen Kim and Martin Jay Seamons. These collaborations have contributed to her success and the advancement of innovative solutions in the semiconductor field.

Conclusion

Ameeta Madhava's contributions to semiconductor processing technologies demonstrate her commitment to innovation and excellence. Her patents reflect her expertise and dedication to improving manufacturing processes in the industry.