Company Filing History:
Years Active: 1999-2001
Title: Allen Thompson: Innovator in Vapor Deposition Technology
Introduction
Allen Thompson is a notable inventor based in San Carlos, CA (US). He has made significant contributions to the field of electronic device fabrication, holding a total of 3 patents. His work primarily focuses on improving physical vapor deposition systems, which are essential in the manufacturing of electronic components.
Latest Patents
Thompson's latest patents include innovative methods and apparatuses that enhance the efficiency and effectiveness of vapor deposition processes. One of his key inventions is the "Use of tapered shadow clamp ring to provide improved physical vapor deposition system." This patent describes a clamping and shielding mechanism that ensures optimal substrate processing by utilizing a shadow ring that overhangs the substrate without making contact. The design features a smoothly tapered substrate contact surface that aligns the clamp ring with the substrate support member, facilitating precise vertical lifting of the substrate.
Another significant patent is the "High pressure/vacuum isolation apparatus and method." This invention introduces a valve system that effectively manages the transition between high pressure and vacuum within a processing chamber. The system includes a branch passageway that connects an intermediate pressure source to the main passageway, allowing for controlled cycling between different pressure states. The innovative valve design ensures high-pressure sealing while maintaining low-pressure integrity, which is crucial for the reliability of the processing chamber.
Career Highlights
Allen Thompson is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display manufacturing industries. His role involves developing advanced technologies that contribute to the efficiency of electronic device fabrication. Thompson's expertise in vapor deposition technology has positioned him as a valuable asset to his team and the industry at large.
Collaborations
Throughout his career, Thompson has collaborated with several talented individuals, including coworkers Joe Stevens and Norman Cowan. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies in the field.
Conclusion
Allen Thompson's contributions to vapor deposition technology exemplify his commitment to advancing electronic device fabrication. His innovative patents and collaborative efforts continue to shape the future of the industry.