The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2000
Filed:
Mar. 10, 1998
Allen Thompson, San Carlos, CA (US);
Shannon Hart, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A valve system is provided for operatively coupling a high pressure source to a processing chamber that selectively cycles between high pressure and vacuum. The valve system includes a branch passageway that selectively communicates a source of intermediate pressure to a main passageway that couples the high pressure source to the processing chamber. The source of intermediate pressure may comprise a vent, a pump, or a source of pressurized fluid, etc. An inventive valve for sealing between the intermediate pressure and the vacuum pressure is also provided. The inlet of the valve is operatively coupled to the high pressure source (via one or more valves) and the outlet of the valve is operatively coupled to the processing chamber (via one or more valves). The valve stem is in continuous fluid contact with the inlet and is configured for high pressure sealing, and the outlet is configured for low pressure sealing and preferably comprises a resilient sealing member.