Mountain View, CA, United States of America

Alexander Veyster


Average Co-Inventor Count = 6.0

ph-index = 2

Forward Citations = 15(Granted Patents)


Company Filing History:


Years Active: 2004-2014

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2 patents (USPTO):Explore Patents

Title: Innovations by Alexander Veyster

Introduction

Alexander Veyster is an accomplished inventor based in Mountain View, CA. He holds a total of 2 patents that showcase his expertise in semiconductor processing and substrate support technologies. His innovative contributions have significantly impacted the field of high-density plasma chemical vapor deposition.

Latest Patents

One of Veyster's latest patents is a method for hermetically joining plate and shaft devices, which includes ceramic materials used in semiconductor processing. This method involves brazing a continuous layer of joining material between two ceramic pieces, allowing for controlled wetting and flow based on various factors such as temperature and atmosphere. The ceramic pieces, which may include aluminum nitride, are designed to withstand the environments within a process chamber and the oxygenated atmosphere found in heater shafts or electrostatic chucks.

Another notable patent is for a substrate support that functions as a radio frequency (RF) electrode in high-density plasma chemical vapor deposition processing. This substrate support features a central upper surface portion and a recessed peripheral upper surface portion, enhancing process performance by reducing electric field edge effects. The design allows for a detachable shield to prevent undesirable deposition without interfering with substrate positioning.

Career Highlights

Throughout his career, Alexander Veyster has worked with prominent companies such as Applied Materials, Inc. and Component Re-engineering Company, Inc. His experience in these organizations has contributed to his development as a leading inventor in his field.

Collaborations

Veyster has collaborated with notable professionals, including Sudhir R Gondhalekar and DongQing Li. These partnerships have further enriched his work and innovations.

Conclusion

Alexander Veyster's contributions to the field of semiconductor processing and substrate support technologies demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology and improving processes in the industry.

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