Dedham, MA, United States of America

Alexander Mazurenko


Average Co-Inventor Count = 1.9

ph-index = 1

Forward Citations = 13(Granted Patents)


Company Filing History:


Years Active: 2008-2012

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3 patents (USPTO):Explore Patents

Title: Alexander Mazurenko: Innovator in Optical Spectroscopy

Introduction

Alexander Mazurenko is a notable inventor based in Dedham, MA (US). He holds a total of 3 patents that contribute significantly to the field of optical spectroscopy. His work focuses on advancing measurement techniques for thin films and semiconductor wafers.

Latest Patents

One of his latest patents is titled "Method and apparatus for reducing probe wavelength in laser excited surface acoustic wave spectroscopy." This invention addresses the challenge of measuring thinner films by reducing the measurement wavelength to approximately 1 micron. By employing a high numerical aperture lens, he enhances the convergence of excitation and probe laser beams, allowing for improved measurement accuracy. Additionally, he has developed a method for blocking unwanted diffraction order beams, which is crucial for retaining long wavelength capabilities.

Another significant patent is the "Method of measuring deep trenches with model-based optical spectroscopy." This invention provides an improved approach to measuring trenches on semiconductor wafers. It allows for the characterization of both the depth and shape of the trench, utilizing advanced Effective Medium Approximation-based modeling to enhance the optical response of trench structures.

Career Highlights

Throughout his career, Alexander has worked with Advanced Metrology Systems LLC, where he has applied his expertise in optical spectroscopy. His contributions have been instrumental in developing innovative measurement techniques that benefit various industries.

Collaborations

Alexander has collaborated with notable individuals in his field, including Alexei Maznev and Zhuoyun Li. These partnerships have fostered advancements in optical measurement technologies.

Conclusion

In summary, Alexander Mazurenko is a distinguished inventor whose work in optical spectroscopy has led to significant advancements in measurement techniques. His patents reflect his commitment to innovation and excellence in the field.

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