This inventor holds 3 USPTO granted patents and 2 published patent applications. Top assignees: Eugenus, Inc., Lam Research Corporation. Active years: 2001-2022.
Company Filing History:
Years Active: 2001-2022
Title: Alex Finkelman: Innovator in Semiconductor Processing
Introduction
Alex Finkelman is a prominent inventor based in San Jose, CA, known for his contributions to semiconductor processing technologies. With a total of 3 patents, Finkelman has made significant advancements in methods and apparatuses that enhance the efficiency and effectiveness of thin film deposition.
Latest Patents
Finkelman's latest patents include innovative technologies such as "Liquid precursor injection for thin film deposition." This technology focuses on the methods of injecting a liquid precursor into a thin film deposition chamber, which involves atomizing the liquid precursor into droplets and vaporizing them for deposition. The patent outlines a method that ensures a stable mass flow rate of the liquid precursor, which is crucial for maintaining the quality of the thin films produced.
Another notable patent is "Systems and methods of placing substrates in semiconductor manufacturing equipment." This invention relates to the calibration of process positions for semiconductor substrates, ensuring precise placement within processing chambers. The method includes securing a calibration substrate and detecting its position using a robot arm, which enhances the accuracy of semiconductor manufacturing processes.
Career Highlights
Throughout his career, Alex Finkelman has worked with notable companies in the semiconductor industry, including Eugenus, Inc. and Lam Research Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor technology.
Collaborations
Finkelman has collaborated with esteemed colleagues such as Niloy Mukherjee and Somilkumar J Rathi. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in the field.
Conclusion
Alex Finkelman is a distinguished inventor whose work in semiconductor processing has led to significant innovations. His patents reflect a commitment to enhancing the efficiency of thin film deposition and substrate placement, making him a valuable contributor to the industry.