Company Filing History:
Years Active: 2000-2008
Title: Alan W. Collins: Innovator in Semiconductor Manufacturing
Introduction
Alan W. Collins, an accomplished inventor based in San Francisco, CA, has made significant contributions to the field of semiconductor manufacturing. With a total of 12 patents to his name, Collins is recognized for his innovative approaches that enhance the efficiency and quality of deposition processes.
Latest Patents
One of his notable inventions is the "Deposition chamber and method for depositing low dielectric constant films." This advanced deposition chamber includes a housing that defines a chamber housing a substrate support. A mixture of oxygen and SiF is delivered through a set of first nozzles, while silane is introduced through second nozzles surrounding the periphery of the substrate support. By separately injecting silane (or a mixture of silane and SiF) and oxygen centrally above the substrate, Collins ensures a uniform dispersal of gases. This method, coupled with optimal flow rates for each gas, results in a consistently low dielectric constant across the film, measured at under 3.4.
Career Highlights
Throughout his career, Collins has excelled in developing cutting-edge technologies that cater to the demands of the semiconductor industry. His work at Applied Materials, Inc. exemplifies his commitment to innovation and excellence in manufacturing processes. His contributions have significantly impacted the advancements in low dielectric constant film deposition.
Collaborations
Collins has also collaborated with notable professionals in the field, including Tetsuya Ishikawa and Padmanabhan Krishnaraj. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies that push the boundaries of semiconductor manufacturing.
Conclusion
Alan W. Collins stands as a prominent figure in the world of innovation and semiconductor technology. With a track record of successful patents and collaborations, he continues to shape the future of the industry through his inventive spirit and relentless pursuit of excellence.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.