San Luis Obispo, CA, United States of America

Alan Strasbaugh


Average Co-Inventor Count = 1.2

ph-index = 6

Forward Citations = 230(Granted Patents)


Company Filing History:


Years Active: 1995-2008

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8 patents (USPTO):Explore Patents

Title: Alan Strasbaugh: Innovator in Wafer Processing Technologies

Introduction

Alan Strasbaugh is a prominent inventor based in San Luis Obispo, California, known for his significant contributions to wafer processing technologies. With a total of eight patents to his name, he has made remarkable advancements in the field of semiconductor manufacturing.

Latest Patents

Strasbaugh's latest patents include a back pressure control system for chemical mechanical polishing (CMP) and wafer polishing. This innovative wafer carrier features a back pressure applicator system designed to provide high-resolution back pressure control. The system incorporates a plurality of millimeter-scale distensible elements positioned between the wafer carrier pressure plate and the process wafer. These elements can be selectively distended to apply excess back pressure to specific areas of the wafer that exhibit resistance to removal compared to the surrounding surface. The distensible elements may take the form of expandable pneumatic chambers or electro-mechanical components such as solenoids, shape memory elements, or electrostatic plates.

Another notable patent involves a method of backgrinding wafers while leaving backgrinding tape on a chuck. This method entails applying backgrinding tape or a pad to the chuck rather than directly to the wafers. The tape or pad remains on the chuck as each wafer is sequentially placed, backgrinded, rinsed on the backside, removed from the tape, and subsequently cleaned on both the front and backside. A specialized tool for applying tape to the chuck facilitates this innovative method.

Career Highlights

Throughout his career, Alan Strasbaugh has worked with various companies, including his own, Strasbaugh. His expertise in wafer processing has positioned him as a key figure in the semiconductor industry.

Collaborations

Strasbaugh has collaborated with notable professionals in the field, including Salman Moudrek Kassir, enhancing the development of innovative technologies in wafer processing.

Conclusion

Alan Strasbaugh's contributions to wafer processing technologies through his patents and career achievements highlight his role as a leading inventor in the semiconductor industry. His innovative methods and systems continue to influence advancements in the field.

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