Princeton, NJ, United States of America

Alan M Todd


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 18(Granted Patents)


Company Filing History:


Years Active: 2000

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1 patent (USPTO):Explore Patents

Title: Alan M Todd: Innovator in Extreme Ultra-Violet Light Technology

Introduction

Alan M Todd is a notable inventor based in Princeton, NJ (US). He has made significant contributions to the field of photolithography through his innovative methods and apparatus for producing extreme ultra-violet light. His work is essential for integrated circuit fabrication and has implications for various technological advancements.

Latest Patents

Alan M Todd holds a patent for a "Method and apparatus for producing extreme ultra-violet light." This invention includes a nozzle for flowing gas at supersonic velocity, a source for directing a radiated energy beam into the gas, and a diffuser to capture a substantial portion of the gas to mitigate contamination. The extreme ultra-violet light produced is particularly suitable for photolithography applications.

Career Highlights

Todd is associated with Advanced Energy Systems, Inc., where he continues to develop and refine technologies related to extreme ultra-violet light. His expertise in this area has positioned him as a key figure in advancing photolithography techniques.

Collaborations

Some of his notable coworkers include Robert M Gutowski and Vincent S Calia. Their collaborative efforts contribute to the innovative environment at Advanced Energy Systems, Inc.

Conclusion

Alan M Todd's contributions to the field of extreme ultra-violet light technology highlight his role as an influential inventor. His patent and ongoing work continue to impact the future of integrated circuit fabrication.

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