Akshay Krishna

Title: Innovations by Akshay Krishna in Semiconductor Measurement Technologies

Introduction

Akshay Krishna is an accomplished inventor based in Ann Arbor, MI. He has made significant contributions to the field of semiconductor measurement technologies. His innovative approach focuses on model-less measurements, which enhances the accuracy and efficiency of semiconductor structure analysis.

Latest Patents

Akshay Krishna holds a patent titled "Methods and systems for model-less, scatterometry based measurements of semiconductor structures." This patent describes methods and systems for performing model-less measurements based on scatterometry measurement data. The process involves direct processing of scatterometry measurement data without relying on traditional measurement models. The measurement sensitivity is defined by changes in detected diffraction images at various non-zero diffraction orders across different illumination incidence angles. Discrete values of a scalar function are determined directly from measured images at each incidence angle. A continuous mathematical function is then fitted to the set of discrete values, allowing for the determination of a parameter of interest through analysis of the mathematical function. In some embodiments, the scalar function includes a weighting function, with optimized weighting values to ensure an accurate fit.

Career Highlights

Akshay Krishna is currently associated with Kla Corporation, where he applies his expertise in semiconductor technologies. His work at Kla Corporation emphasizes the importance of innovative measurement techniques in advancing semiconductor manufacturing processes.

Collaborations

Due to space constraints, the collaborations section will be omitted.

Conclusion

Akshay Krishna's contributions to semiconductor measurement technologies through his innovative patent demonstrate his commitment to advancing the field. His work continues to influence the industry and improve measurement techniques.