Location History:
- Hyogo, JP (1987 - 1995)
- Itami, JP (1993 - 1995)
Company Filing History:
Years Active: 1987-1995
Title: Innovator Akira Tokui: Pioneering Semiconductor Advancements
Introduction
Akira Tokui, hailing from Hyogo, Japan, is a prominent inventor recognized for her significant contributions to the semiconductor industry. With an impressive portfolio of 12 patents, she has made notable advancements that enhance the efficiency of semiconductor substrate treatments.
Latest Patents
Among her latest innovations, two patents stand out:
1. **Method for Pretreating Semiconductor Substrate by Photochemically**
This invention presents a method for effectively removing a natural gas film or contaminants from the surface of a silicon semiconductor substrate. The process involves placing the substrate in a chamber, introducing HCl gas, and heating it while irradiating ultraviolet rays. This synergistic approach of heat and light energy allows for the removal of natural oxide films at lower temperatures.
2. **Method of Forming a Thin Film on Surface of Semiconductor Substrate**
This patent outlines a method alongside an apparatus for eliminating naturally grown oxide films and other contaminants before forming a thin film on a cleaned semiconductor substrate surface. Utilizing hydrogen chloride gas and ultraviolet irradiation during a controlled temperature range, this technique allows for the effective preparation of the substrate, enhancing the quality of the thin film application.
Career Highlights
Akira Tokui has demonstrated remarkable expertise in semiconductor technology while working at Mitsubishi Electric Corporation. Her practical knowledge and innovative spirit have inspired advancements that benefit the entire industry. Akira's dedication to research and development has not only led to her success but also paved the way for future innovations.
Collaborations
Throughout her career, Akira has collaborated with esteemed colleagues, including Katsuhiro Tsukamoto and Masanobu Iwasaki. Their combined efforts have enriched her projects, resulting in groundbreaking patents that continue to impact semiconductor manufacturing processes.
Conclusion
Akira Tokui’s contributions to the field of semiconductors highlight her role as a leading innovator. Through her outstanding patents and collaborations, she has demonstrated the power of innovation in enhancing industrial processes. Her work paves the way for future advancements, establishing her as a key figure in technology and engineering.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.