Company Filing History:

3 out of 10,295

Tokyo Electron Limited

patents

Years Active: 2017-2019

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10319567 - Microwave plasma source and plasma processing apparatus (2019-06-11),

2. 9640388 - Method for forming insulating film and method for manufacturing semiconductor device (2017-05-02),

3. 9548187 - Microwave radiation antenna, microwave plasma source and plasma processing apparatus (2017-01-17),

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.

For the Inventor, By the Inventor

Akira Tanihara

Location History:

Company Filing History:

Years Active: 2017-2019