Company Filing History:

4 out of 10,295

Tokyo Electron Limited

patents

1 out of 79

Tokyo Electron Kabushiki Kaisha

patents

Years Active: 1996-2004

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6770332 - Method for forming film by plasma (2004-08-03),

2. 6479897 - Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same (2002-11-12),

3. 6337290 - Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same (2002-01-08),

4. 5531834 - Plasma film forming method and apparatus and plasma processing apparatus (1996-07-02),

5. 5522934 - Plasma processing apparatus using vertical gas inlets one on top of (1996-06-04),

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Location History:

Company Filing History:

Years Active: 1996-2004